Ultralow drift advanced AFM-IR & s SNOM imaging and spectroscopy system for infrared spectral range with 10 nm spatial resolution for 3-12 μm spectral range. AFM probe is located in the focus of optical system which excites sample structure by IR laser and collects the optical response. Collected light is directed to Michelson interferometer for optical analysis. NTEGRA Nano IR system allows detection of near-field signal amplitude and phase. Spatial resolution of IR s-SNOM is about 10 nm and defined only by tip size. Applications: Semiconductors nanostructures; Polymers; Nanocomposite materials; Ultrathin films (monolayers); etc.