Excimer laser CLS 5000 is a laser with transversal electrical discharge in gas mix of high pressure, with magnetic switch generator (solid state HV switch). These lasers have a single module design. They have a high stability of average power, extended gas lifetime and computer control. Excimer laser Series CLS 5000 can be used for medicine, lithography and other areas, and also it can be used as a source of powerful coherent pulsed UV radiation.