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PESQUISAS E DESENVOLVIMENTO
OJSC SCIENTIFIC RESEARCH INSTITUTE OF PRECISION MECHANICAL ENGINEERING
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CÓDIGO DO PRODUTO (HS 2017)
848620
Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor devices or of electronic integrated circuits
CÓDIGO DO PRODUTO (HS 2017)
848620
Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor devices or of electronic integrated circuits
VACUUM-PLASMA EQUIPMENT for dry surface treatment in plasma of HF discharge (Plasma etching) PLASMA TM 7
DESCRIPTION
Etching of thin dielectric and metal films, as well as semiconductor materials by the method of reactive ion etching.
