Join catalogue
CÓDIGO DEL PRODUCTO (HS 2017)
848620
Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor devices or of electronic integrated circuits
VACUUM-PLASMA EQUIPMENT for dry surface treatment in plasma of HF discharge (Reactive-ion etching of layers (RIE) PLASMA TM 5)
DESCRIPTION
Plasma chemical selective (reactive-ionic, anisotropic) etching of dielectric and metal films.